DocumentCode
2134270
Title
A micromechanical DC-voltage reference
Author
Oja, A.S. ; Kyynarainen, J. ; Seppa, H. ; Lampola, T.
Author_Institution
VTT Autom., Finland
fYear
2000
fDate
14-19 May 2000
Firstpage
701
Lastpage
702
Abstract
Prototype of a novel DC voltage reference has been constructed. A characteristic voltage of an electrostatically actuated micromechanical silicon device provides the reference voltage. Its stability relies on elastic properties of monocrystalline silicon. The device is suited for batch fabrication and may prove more stable than Zener voltage references.
Keywords
circuit feedback; electrostatic actuators; measurement uncertainty; transfer standards; voltage measurement; Si; batch fabrication; characteristic voltage; device stability; displacement fluctuations; elastic properties dependence; electrostatically actuated device; micromechanical DC-voltage reference; monocrystalline silicon; pull-in voltage tracking; spring constant; uncertainty; Capacitors; Elasticity; Electrodes; Electrostatics; Iron; Micromechanical devices; Silicon; Springs; Stability; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 2000 Conference on
Conference_Location
Sydney, NSW, Australia
Print_ISBN
0-7803-5744-2
Type
conf
DOI
10.1109/CPEM.2000.851204
Filename
851204
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