• DocumentCode
    2134990
  • Title

    Design, fabrication and test of silicon heat pipes with radial microcapillary grooves

  • Author

    Ivanova, M. ; Lai, A. ; Gillot, C. ; Sillon, N. ; Schaeffer, C. ; Lefèvre, F. ; Lallemand, M. ; Fournier, E.

  • Author_Institution
    CEA-DRT - LETI/DIHS/LTPI, Grenoble
  • fYear
    2006
  • fDate
    May 30 2006-June 2 2006
  • Firstpage
    545
  • Lastpage
    551
  • Abstract
    The miniaturization and improving performance of electronic devices has lead to increasing power densities in electronic systems. Consequently, the thermal environment has become a main issue in their performance and reliability. The use of flat miniature heat pipes has been investigated for transferring the heat over distances or to spread it over a larger surface area to avoid hot spots on the device. The interest of silicon etching techniques for heat pipe manufacturing is that such heat pipes can be very compact, very light and have better heat transfer capacities than metallic heat pipes. In this paper the structure of a flat radial structure silicon heat pipe is presented. A one dimensional two-phase flow model has been developed in order to optimize the performances of the radial grooved silicon heat pipe. Then an experimental study investigates the thermal performance of a realized prototype. The thermal transfer capacities achieved are in the range 50-70 W depending on the working temperature
  • Keywords
    heat pipes; heat transfer; silicon; thermal management (packaging); two-phase flow; 1D two-phase flow model; flat radial structure; radial microcapillary grooves; silicon heat pipes; thermal performance; thermal transfer capacities; Etching; Fabrication; Heat transfer; Manufacturing; Power system reliability; Prototypes; Silicon; Temperature dependence; Temperature distribution; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal and Thermomechanical Phenomena in Electronics Systems, 2006. ITHERM '06. The Tenth Intersociety Conference on
  • Conference_Location
    San Diego, CA
  • ISSN
    1087-9870
  • Print_ISBN
    0-7803-9524-7
  • Type

    conf

  • DOI
    10.1109/ITHERM.2006.1645392
  • Filename
    1645392