3D microstructured cantilevers for optical detection applications

Author

Muller, Raluca ; Pavelescu, Loan ; Moagar-Poladian, Victor ; Manea, Elena ; Nedelcu, Oana-Tatiana ; Avramescu, Morel

Author_Institution

Inst. of Microtechnol., Bucharest, Romania

Volume

2

fYear

1997

fDate

7-11 Oct 1997

Firstpage

537

Abstract

In this work we report integrated SiON light waveguides on cantilevers realised by silicon anisotropic etching techniques. The cantilever structure is a multilayered structure and consists in a SiO ₂/SiON/SiO₂ sandwich. To strongly improve our technological processes, internal stresses in a such structure have been evaluated using simple stress models presented in literature. For comparison a finite element analysis using ANSYS software was performed

Keywords

etching; finite element analysis; integrated optics; internal stresses; microsensors; optical waveguides; photodetectors; silicon compounds; 3D microstructured cantilever; ANSYS software; SiO₂-SiON-SiO₂; SiO₂/SiON/SiO₂ sandwich; finite element analysis; integrated SiON light waveguide; internal stress model; multilayered structure; optical detection; silicon anisotropic etching; Anisotropic magnetoresistance; Etching; Finite element methods; Geometrical optics; Internal stresses; Optical detectors; Optical waveguides; Performance analysis; Silicon; Software performance;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International

Conference_Location

Sinaia

Print_ISBN

0-7803-3804-9

Type

conf

DOI

10.1109/SMICND.1997.651308

Filename

651308