The Method of Waveguide-Junction Resonance for Integrated Ferroelectric Films Investigation

The advances in integrated ferroelectric films applications stimulate new techniques for film quality examinations and its processing reliable control. Being non-electrode and in most cases non-contact, microwave methods are indestructive so the dada about ferroelectric film quality could be obtained at various stages of integral film processing. A new fixture for ferro-and paraelectric films microwave investigations, based on junction "round waveguides - a radial waveguide" is proposed. For creating a fixture design theoretical base, a rigorous solution of the eigen axially-symmetrical H0 ps, - mode of waveguide junction containing two dielectric layers is obtained. The electrodynamic computation of this structure has been carried out by the field superposition method. The principal advantage of this test method is in the local measuring of a large range of ferroelectric integrated films having no sizes limitation.