DocumentCode
2135854
Title
A novel PDMS based capacitive pressure sensor
Author
Riedl, X. ; Bolzmacher, C. ; Wagner, R. ; Bauer, K. ; Schwesinger, N.
Author_Institution
Sensors, Electron. & Syst. Integration, EADS Innovation Works, Munich, Germany
fYear
2010
fDate
1-4 Nov. 2010
Firstpage
2255
Lastpage
2258
Abstract
In this paper, a capacitive pressure sensor for aeronautical applications is presented. The sensor mainly consists of a thin structured layer of Polydimethylsiloxane (PDMS) that is embedded between two metal films. In this application the structured PDMS layer is used as dielectric and as spring element. The optimal design of the sensor was determined using a finite element analysis. The technological implementation of the first test samples using microtechnology is shown. The static and dynamic characterization of the pressure sensor validates the high sensitivity and temporal resolution of the sensor.
Keywords
capacitive sensors; metallic thin films; pressure sensors; PDMS; aeronautical applications; capacitive pressure sensor; high sensitivity; metal films; optimal design; technological implementation; temporal resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2010 IEEE
Conference_Location
Kona, HI
ISSN
1930-0395
Print_ISBN
978-1-4244-8170-5
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2010.5690709
Filename
5690709
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