Title :
3-D modelling for waveguide to opto-FET leaky-wave coupling in silicon microsystems
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Abstract :
The paper presents a model for leaky-wave coupling of a waveguide to an opto-FET. The opto-FET, due to its high responsivity, is very useful in an integrated microsystem because it can replace both a photodiode and am amplifier. The most interesting conclusion of the model is that, in case of leaky-wave coupling of the opto-FET to a waveguide, the dependence of the photoresponse on incident optical power is practically linear, while in the case of uniform illumination it is logarithmic
Keywords :
elemental semiconductors; field effect transistors; integrated optics; optical couplers; phototransistors; silicon; 3D model; Si; integrated silicon microsystem; leaky wave coupling; opto-FET; waveguide; FETs; Gratings; Lighting; Optical coupling; Optical sensors; Optical waveguide theory; Optical waveguides; Photodiodes; Silicon; Three dimensional displays;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651310
