Title :
Integrated microwave inductors on Silicon-on-Insulator substrate
Author :
Huynen, I. ; Raskin, J.P. ; Gillon, R. ; Vanhoenacker, D. ; Colinge, J.P.
Author_Institution :
Microwave Laboratory, Université Catholique de Louvain, Bâtiment Maxwell, B-1348 Louvain-la-Neuve, Belgium. Fax: +32 10 47 87 05; Tél. : + 32 10 47 40 20, huynen@emic.ucl.ac.be
Abstract :
This paper presents a new wideband analysis method for integrated spiral and meander inductors on semiconductor substrates. This method is based on the evaluation of the parameters of the coupled lines constituting the inductors by a newly-developed variational expression and has been validated by measurements. Its purpose is to optimize the design of integrated inductors in order to obtain adequate values for matching and resonant circuits in the frequency range 1-10 GHz.
Keywords :
Coupling circuits; Design optimization; Frequency; Inductors; Integrated circuit measurements; RLC circuits; Silicon on insulator technology; Spirals; Substrates; Wideband;
Conference_Titel :
Microwave Conference, 1997. 27th European
Conference_Location :
Jerusalem, Israel
DOI :
10.1109/EUMA.1997.337928
