DocumentCode
2136737
Title
A method for more accurate measurement of diffraction gratings efficiency
Author
Dragnea, L. ; Ilie, M. ; Vitriuc, A. ; Sindile, P. ; Iancu, O.
Author_Institution
Inst. of Microtechnol., Bucharest, Romania
Volume
2
fYear
1997
fDate
7-11 Oct 1997
Firstpage
545
Abstract
A simpler and efficient measuring method for diffraction grating efficiency is presented. To measure the diffraction efficiency an optical system and a photodetector are used. The method consists in simplifying the optical system by replacing the output of the optical system with an aperture, and in calculating the distance between the photodetector and this aperture
Keywords
diffraction gratings; optical transfer function; optical variables measurement; photodetectors; aperture; diffraction grating; efficiency measurement; optical system; optical transfer function; photodetector; Apertures; Diffraction gratings; Focusing; Laser beam cutting; Laser beams; Lenses; Mirrors; Optical diffraction; Photodetectors; Transfer functions;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location
Sinaia
Print_ISBN
0-7803-3804-9
Type
conf
DOI
10.1109/SMICND.1997.651312
Filename
651312
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