Title :
Dynamic Scheduling for Semiconductor Wafer Fabrication Based on ETAEMS and MAS
Author :
Ma, Xin ; He, Ying ; Shi, Xiaohu ; Liang, Yanchun
Author_Institution :
Coll. of Comput. Sci. & Technol., Jilin Univ., Changchun, China
Abstract :
The dynamic scheduling problem of semiconductor wafer fabrication is a highly complicated discrete event system. Based on multi-agent system and ETAEMS method, this paper develops an efficient dynamic scheduling system called by MEBDSS. Intelligent computing algorithms are also applied in the method. Computational experiment results show that the proposed method is effective and better than existing methods.
Keywords :
dynamic scheduling; multi-agent systems; production engineering computing; semiconductor device manufacture; ETAEMS; MAS; discrete event system; dynamic scheduling; intelligent computing algorithms; multiagent system; semiconductor wafer fabrication; Assembly; Dynamic scheduling; Etching; Fabrication; Job shop scheduling; Semiconductor device modeling;
Conference_Titel :
Frontier of Computer Science and Technology (FCST), 2010 Fifth International Conference on
Conference_Location :
Changchun, Jilin Province
Print_ISBN :
978-1-4244-7779-1
DOI :
10.1109/FCST.2010.21
