GaAs monolithic integrated microwave power sensor in coplanar waveguide technology

Author

Dehe, A. ; Klingbeil, H. ; Krozer, V. ; Fricke, K. ; Beilenhoff, K. ; Hartnagel, H.L.

Author_Institution

Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany

Volume

1

fYear

1996

fDate

17-21 June 1996

Firstpage

161

Abstract

We present the fabrication technology, theoretical and experimental results of a novel MMIC compatible broadband power sensor. With a 50 /spl Omega/ coplanar waveguide design, integrated AlGaAs thermoelectric sensor and GaAs bulk micromachined membrane for increased sensitivity this sensor is capable of detecting RF power with a sensitivity of 1.1 V/W without any waveguide coupling structure.

Keywords

III-V semiconductors; MMIC; UHF measurement; coplanar waveguides; electric sensing devices; etching; gallium arsenide; integrated circuit technology; membranes; micromachining; microsensors; microwave measurement; power measurement; thermoelectric devices; AlGaAs; CPW technology; GaAs; GaAs bulk micromachined membrane; MMIC compatible sensor; RF power detection; broadband power sensor; coplanar waveguide technology; fabrication technology; integrated AlGaAs thermoelectric sensor; microwave power sensor; monolithic integrated sensor; sensor sensitivity; Biomembranes; Conductors; Coplanar waveguides; Electromagnetic heating; Gallium arsenide; MMICs; Microwave sensors; Microwave technology; Temperature measurement; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1996., IEEE MTT-S International

Conference_Location

San Francisco, CA, USA

ISSN

0149-645X

Print_ISBN

0-7803-3246-6

Type

conf

DOI

10.1109/MWSYM.1996.508486

Filename

508486