Title :
GaAs monolithic integrated microwave power sensor in coplanar waveguide technology
Author :
Dehe, A. ; Klingbeil, H. ; Krozer, V. ; Fricke, K. ; Beilenhoff, K. ; Hartnagel, H.L.
Author_Institution :
Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany
Abstract :
We present the fabrication technology, theoretical and experimental results of a novel MMIC compatible broadband power sensor. With a 50 /spl Omega/ coplanar waveguide design, integrated AlGaAs thermoelectric sensor and GaAs bulk micromachined membrane for increased sensitivity this sensor is capable of detecting RF power with a sensitivity of 1.1 V/W without any waveguide coupling structure.
Keywords :
III-V semiconductors; MMIC; UHF measurement; coplanar waveguides; electric sensing devices; etching; gallium arsenide; integrated circuit technology; membranes; micromachining; microsensors; microwave measurement; power measurement; thermoelectric devices; AlGaAs; CPW technology; GaAs; GaAs bulk micromachined membrane; MMIC compatible sensor; RF power detection; broadband power sensor; coplanar waveguide technology; fabrication technology; integrated AlGaAs thermoelectric sensor; microwave power sensor; monolithic integrated sensor; sensor sensitivity; Biomembranes; Conductors; Coplanar waveguides; Electromagnetic heating; Gallium arsenide; MMICs; Microwave sensors; Microwave technology; Temperature measurement; Thermal sensors;
Conference_Titel :
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3246-6
DOI :
10.1109/MWSYM.1996.508486
