Title :
Step deposition and stabilizer interaction in electroless nickel bath for bond pad metallization
Author :
Tiwari, Chandra ; Nguyen, Robert ; Phucas, Nick ; Teo, Bee Bee ; Steneck, Travis
Author_Institution :
Micron Technol. Manassas, Manassas, VA, USA
Abstract :
Stabilizers are key components of electroless nickel baths. Therefore, understanding the limitations and characteristics of stabilizers is very important for consistently achieving desired plating results. Higher concentrations of stabilizers cause defects like skip and step plating, whereas lower concentrations can lead to short bath life and bath decomposition. This paper studies the step deposition and stabilizer interaction on electroless nickel bath.
Keywords :
electroless deposition; electroplating; metallisation; nickel; Ni; bath decomposition; bond pad metallization; electroless nickel bath; stabilizer interaction; step deposition; step plating; Chemicals; Copper; Metallization; Nickel; Stability criteria; Surface treatment; Electroless nickel; anisotropic deposition; bond pad; defects; skip plating; stabilizer; step plating;
Conference_Titel :
Microelectronics and Electron Devices (WMED), 2012 IEEE Workshop on
Conference_Location :
Boise, ID
Print_ISBN :
978-1-4577-1735-2
DOI :
10.1109/WMED.2012.6202617