• DocumentCode
    2139236
  • Title

    Electromagnetic analysis of effective anisotropic material parameters for metal dummies in a CMOS chip

  • Author

    Hirano, Takuichi ; Okada, Kenichi ; Hirokawa, Jiro ; Ando, Makoto

  • Author_Institution
    Dept. of Int., Tokyo Inst. of Technol., Tokyo, Japan
  • fYear
    2012
  • fDate
    8-14 July 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Equivalent anisotropic material parameters for metal dummies in a CMOS chip are extracted using eigenmode analysis for a unit-cell of a space filled with metal dummies. For verification, a space filled with periodically arranged 5 μm × 5 μm aluminum dummy fills with area density of 25 % are numerically simulated. Anisotropic characteristics and higher effective permittivity, of about 20-75 %, are observed.
  • Keywords
    CMOS integrated circuits; MIMIC; aluminium; eigenvalues and eigenfunctions; electromagnetic fields; permittivity; CMOS chip; aluminum dummy; effective anisotropic material parameters; effective permittivity; eigenmode analysis; electromagnetic analysis; metal dummies; millimeter-wave CMOS RF circuits; unit-cell; Anisotropic magnetoresistance; CMOS integrated circuits; Dielectrics; Metals; Permittivity; Propagation constant; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Antennas and Propagation Society International Symposium (APSURSI), 2012 IEEE
  • Conference_Location
    Chicago, IL
  • ISSN
    1522-3965
  • Print_ISBN
    978-1-4673-0461-0
  • Type

    conf

  • DOI
    10.1109/APS.2012.6348496
  • Filename
    6348496
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2139236