Title :
Electromagnetic analysis of effective anisotropic material parameters for metal dummies in a CMOS chip
Author :
Hirano, Takuichi ; Okada, Kenichi ; Hirokawa, Jiro ; Ando, Makoto
Author_Institution :
Dept. of Int., Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
Equivalent anisotropic material parameters for metal dummies in a CMOS chip are extracted using eigenmode analysis for a unit-cell of a space filled with metal dummies. For verification, a space filled with periodically arranged 5 μm × 5 μm aluminum dummy fills with area density of 25 % are numerically simulated. Anisotropic characteristics and higher effective permittivity, of about 20-75 %, are observed.
Keywords :
CMOS integrated circuits; MIMIC; aluminium; eigenvalues and eigenfunctions; electromagnetic fields; permittivity; CMOS chip; aluminum dummy; effective anisotropic material parameters; effective permittivity; eigenmode analysis; electromagnetic analysis; metal dummies; millimeter-wave CMOS RF circuits; unit-cell; Anisotropic magnetoresistance; CMOS integrated circuits; Dielectrics; Metals; Permittivity; Propagation constant; Silicon;
Conference_Titel :
Antennas and Propagation Society International Symposium (APSURSI), 2012 IEEE
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-4673-0461-0
DOI :
10.1109/APS.2012.6348496
