Title :
Development of a MEMS-based Raman spectrometer
Author :
Russin, Timothy ; Fralick, Mark ; Kerber, Max ; Wang, Andrew ; Waters, Richard
Author_Institution :
Adv. Circuits & Sensors Branch, Space & Naval Warfare Syst. Center Pacific (SSC Pacific), San Diego, CA, USA
Abstract :
This paper discusses the development of a Raman spectrometer incorporated into a MEMS device for use in environmental monitoring against chemical and biological agents. The current design incorporates a 1525 nm laser diode as an optical pump source, and a tunable Fabry-Perot interferometer as the wavelength selection element.
Keywords :
Fabry-Perot interferometers; Raman spectroscopy; microsensors; MEMS; Raman spectrometer; biological agents; chemical agents; environmental monitoring; laser diode; optical pump source; tunable Fabry Perot interferometer;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5690855
