A high-G acceleration latching switch with integrated normally-open/close paths independent to the proof-mass

An acceleration latching switch with integrated normally Open/Close paths is presented in this paper. Two arch trusses used as fracture parts of the normally-close path are connected in series to form the normally close path, which will be broken and latched by the latching mechanism to reach the open state once the input acceleration beyond threshold. Moreover, the normally-open path is consisted of multi-contact and both paths are mechanically separated from the proof mass to prevent them from the impact resulted from the vibration of the proof mass at the latched state. The switch was fabricated by a two-mask silicon-on-glass process and tested. The latching shock is 1 5000 G and the response time is about 0.1 ms. The normally-close path has a resistance of 4Ω and a maximum current of 100 mA while the normally-open path has a contact resistance of no more than 3.7Ω and the safe applied current is up to 140 mA.