Title :
5 GHz low-loss SAW filters
Author :
Yamanouchi, K. ; Odagawa, H. ; Meguro, T.
Abstract :
A new electrode thickness difference type of single phase unidirectional surface acoustic wave (SAW) transducer (ETD-SPUDT), which has 1/4 narrow-gap electrodes is investigated. The ETD-SPUDT is fabricated by cutting a part of a meander-line electrode by using the shadow of the resist pattern. The theoretical and experimental results show the low loss and large directivity. The low loss filter on 128/spl deg/ Y-X LiNbO/sub 3/ is fabricated by optical photo-lithography techniques in 2 GHz-range and by electron beam exposure in 5 GHz-range. The results show 2.2 dB insertion loss at 1 GHz, 3.0 dB at 2 GHz and 4.1 dB at 5 GHz.
Keywords :
acoustic microwave devices; lithium compounds; microwave filters; surface acoustic wave filters; surface acoustic wave transducers; 1 to 5 GHz; 2.2 to 4.1 dB; ETD-SPUDT; LiNbO/sub 3/; Y-X LiNbO/sub 3/; directivity; electrode thickness difference type; electron beam lithography; fabrication; insertion loss; low-loss SAW filter; meander-line electrode; narrow-gap electrodes; optical photolithography; resist; single phase unidirectional surface acoustic wave transducer; Acoustic transducers; Acoustic waves; Electrodes; Electron optics; Optical filters; Optical losses; Optical surface waves; Resists; SAW filters; Surface acoustic waves;
Conference_Titel :
Microwave Symposium Digest, 1996., IEEE MTT-S International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3246-6
DOI :
10.1109/MWSYM.1996.508754
