Abstract :
Microsensors are physically small sensors. Although there is no precise definition of what is considered to be small, typically people think of microsensors as those which are made using the microfabrication techniques employed in VLSI and ULSI semiconductor chips. Using the available technologies, the physical dimensions of microsensors could range from 0.1 μm up to about 1000 μm. Because of their small size, they can potentially be integrated with signal conditioning, intelligent electronics, and even actuators on a single chip. The topics considered by the author include: sensor design and operation; fabrication technologies; and sensor system integration
Keywords :
integrated circuit technology; intelligent sensors; microsensors; IC fabrication technologies; microfabrication techniques; microsensor engineering; sensor design; sensor system integration; Acoustic sensors; Actuators; Control systems; Costs; Intelligent sensors; Microsensors; Modems; Power engineering and energy; Sensor systems; Switches;
