Measurement and simulation of the behavior of a short spark gap used as ESD protection device

The voltage-current behavior of a short spark gap having 6 μm gap distance as a protection device against electrostatic discharge (ESD) is described. The protection capabilities and deviation of important parameters as a function of the number of applied discharges are presented and discussed. A new PSPICE model able to simulate surface and gas discharge processes at the spark gap is introduced. Measurement and simulation data are compared while taking these fundamental processes into account.