Self-consistent modeling of higher pressure Microwave PACVD reactors

Self-consistent simulation of Microwave PACVD reactors at higher pressures is challenging as it involves coupling many different physical phenomena that are highly nonlinear. This paper presents a solution for these problems. Two major components of the simulation include a finite-difference frequency domain (FDFD) electromagnetic model, and a steady-state convective plasma flow model. These two components are run concurrently while converging toward a single, self-consistent solution. To our knowledge, this is the first model to describe in detail the various physical, chemical, and thermal processes occurring during Microwave PACVD diamond film growth at higher pressures (up to 40% atmosphere). Detailed results and comparisons with experimental data will be presented at the conference.