Electrostatic discharge (ESD) and technology Scaling: The future of ESD protection in advanced technology

Author

Voldman, Steven H.

Author_Institution

Vermont, USA

fYear

2008

fDate

20-23 Oct. 2008

Firstpage

325

Lastpage

328

Abstract

In this paper, electrostatic discharge (ESD) protection in advanced technologies is discussed. The dilemma of ESD protection in advanced technologies and whether we will maintain the need, and desire to provide ESD protection in the future will be reviewed. This issue will influence the direction of the field of ESD protection and the ESD Technology Roadmap. The paper will also focus on what will be the ESD devices used in future 45 nm and 32 nm technologies. What will be the customer expectation, and what will be the ability to continue to achieve these objectives in the future?

Keywords

customer satisfaction; electrostatic discharge; scaling phenomena; ESD devices; ESD protection; ESD technology roadmap; customer expectation; electrostatic discharge; size 32 nm; size 45 nm; technology scaling; Circuit synthesis; Councils; Electronics industry; Electrostatic discharge; Protection; Robustness; Semiconductor device manufacture; Semiconductor process modeling; Space technology; Technological innovation;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-2185-5

Electronic_ISBN

978-1-4244-2186-2

Type

conf

DOI

10.1109/ICSICT.2008.4734537

Filename

4734537