Validation of inverse eigenvalue technique for characterisation of coupled micro/nano resonators

Coupling between micro/nanomechanical resonators has been suggested as a means of monitoring the responses of several resonant sensors. In this paper a method is described to determine the system matrix for a linear chain of resonators based upon an inverse eigenvalue analysis. This method relies upon the ability to induce a temporary change to one of the terminal resonators, which is made possible by electrostatic softening. The proposed method has been validated by showing that a system matrix obtained using the method can accurately predict both the eigenvalues and the eigenvectors of the associated set of coupled resonators.