DocumentCode
21442
Title
Electroplated Nickel Multielectrode Microprobes With Flexible Parylene Cable for Neural Recording and Stimulation
Author
Huaiqiang Yu ; Nenggan Zheng ; Wei Wang ; Shuo Wang ; Xiaoxiang Zheng ; Zhihong Li
Author_Institution
Inst. of Microelectron., Peking Univ., Beijing, China
Volume
22
Issue
5
fYear
2013
fDate
Oct. 2013
Firstpage
1199
Lastpage
1206
Abstract
We design, fabricate, and characterize nickel-based multielectrode microprobes integrated with flexible parylene cable employing low-cost nickel electroplating process, intended for multichannel recording and stimulation of neurons in the brain. Electroplated nickel microprobes, which are encapsulated with parylene for biocompatibility, are more mechanically robust than brittle silicon-based ones. The selectively integrated flexible parylene cable facilitates the connection with external circuits and reduces the packaging requirements. The mechanical and electrical characterizations have been performed. Using the microprobes, the spontaneous neural activity in rat´s hippocampus is recorded and the wing beat of tethered worker honeybees is initiated by delivering the stimulating pulse into the optic lobes.
Keywords
bioelectric phenomena; biomedical electrodes; biomedical materials; brain; electroplating; neurophysiology; nickel; polymers; Ni; biocompatibility; brain; electrical characterizations; electroplated nickel multielectrode microprobes; flexible parylene cable; low-cost nickel electroplating process; mechanical characterizations; multichannel recording; neural recording; neural stimulation; optic lobes; rat hippocampus; spontaneous neural activity; tethered worker honeybees; Neural recording; electroplated nickel; multielectrode microprobes; parylene;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2013.2262591
Filename
6552968
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