• DocumentCode
    21442
  • Title

    Electroplated Nickel Multielectrode Microprobes With Flexible Parylene Cable for Neural Recording and Stimulation

  • Author

    Huaiqiang Yu ; Nenggan Zheng ; Wei Wang ; Shuo Wang ; Xiaoxiang Zheng ; Zhihong Li

  • Author_Institution
    Inst. of Microelectron., Peking Univ., Beijing, China
  • Volume
    22
  • Issue
    5
  • fYear
    2013
  • fDate
    Oct. 2013
  • Firstpage
    1199
  • Lastpage
    1206
  • Abstract
    We design, fabricate, and characterize nickel-based multielectrode microprobes integrated with flexible parylene cable employing low-cost nickel electroplating process, intended for multichannel recording and stimulation of neurons in the brain. Electroplated nickel microprobes, which are encapsulated with parylene for biocompatibility, are more mechanically robust than brittle silicon-based ones. The selectively integrated flexible parylene cable facilitates the connection with external circuits and reduces the packaging requirements. The mechanical and electrical characterizations have been performed. Using the microprobes, the spontaneous neural activity in rat´s hippocampus is recorded and the wing beat of tethered worker honeybees is initiated by delivering the stimulating pulse into the optic lobes.
  • Keywords
    bioelectric phenomena; biomedical electrodes; biomedical materials; brain; electroplating; neurophysiology; nickel; polymers; Ni; biocompatibility; brain; electrical characterizations; electroplated nickel multielectrode microprobes; flexible parylene cable; low-cost nickel electroplating process; mechanical characterizations; multichannel recording; neural recording; neural stimulation; optic lobes; rat hippocampus; spontaneous neural activity; tethered worker honeybees; Neural recording; electroplated nickel; multielectrode microprobes; parylene;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2013.2262591
  • Filename
    6552968