DocumentCode :
2144374
Title :
Influence of the reactive gases nature on Ti(C,N) hard coatings in cathodic vacuum arc deposition
Author :
Braic, V. ; Braic, M. ; Balaceanu, M. ; Pavelescu, G.
Author_Institution :
Nat. Inst. for Optoelectronics, Bucharest, Romania
fYear :
2002
fDate :
2002
Firstpage :
166
Lastpage :
169
Abstract :
Ti(C,N) hard coatings were prepared by the cathodic vacuum arc deposition method in a reactive atmosphere consisted of a mixture of either N2+C2H2 or N2+CH4 gases. The influence of the gas composition on the film properties (microhardness, adhesion, deposition rate, phase composition, texture) has been investigated. Optical emission spectroscopy of the reactive plasma was also performed.
Keywords :
microhardness; plasma deposited coatings; plasma deposition; titanium compounds; vacuum arcs; vacuum deposited coatings; vacuum deposition; Ti(C,N) hard coatings; adhesion; cathodic vacuum arc deposition method; deposition rate; film properties; gas composition; microhardness; optical emission spectroscopy; phase composition; reactive atmosphere; texture; Adhesives; Atherosclerosis; Atmosphere; Coatings; Gases; Optical films; Plasma properties; Spectroscopy; Substrates; Vacuum arcs;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 2002. 20th International Symposium on
Print_ISBN :
0-7803-7394-4
Type :
conf
DOI :
10.1109/ISDEIV.2002.1027333
Filename :
1027333
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2144374
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