Title :
Integration of carbon nanotubes in microelectronics
Author :
Swart, Jacobus ; Moshkalev, Stanislav
Author_Institution :
Res. Center CenPRA, Campinas, Brazil
Abstract :
Practical aspects of synthesis and applications of single-wall and multi-wall carbon nanotubes (SWNT and MWNT, respectively) are presented. Among numerous potential applications, utilization of nanotubes for interconnections in microelectronics and in gas sensors is considered in more detail. The issues related to compatibility of nanotubes synthesis and manipulation processes with the Si planar technology are analysed.
Keywords :
carbon nanotubes; elemental semiconductors; integrated circuit interconnections; nanoelectronics; silicon; C; Si; gas sensors; interconnections; microelectronics; multiwall carbon nanotubes; planar technology; single-wall carbon nanotubes; Carbon nanotubes; Contact resistance; Copper; Current density; Integrated circuit interconnections; Integrated circuit synthesis; Jacobian matrices; Microelectronics; Semiconductivity; Semiconductor nanotubes;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4734606
