Title :
Integration challenge of silicon photonics with microelectronics
Author :
Paniccia, Mario ; Liu, Ansheng ; Izhaky, Nahum ; Barkai, Assia
Author_Institution :
Photonics Technol. Lab., Intel Corp., Santa Clara, CA, USA
Abstract :
In this presentation we discuss some practical issues and challenges associated with processing silicon photonic devices in a high volume CMOS manufacturing environment and the challenges of integrating the photonic devices with microelectronics.
Keywords :
CMOS integrated circuits; elemental semiconductors; integrated optics; integrated optoelectronics; silicon; CMOS manufacturing; Si; microelectronics; silicon photonic devices; silicon photonics integration; CMOS process; Costs; Electronics packaging; Integrated optics; Manufacturing processes; Microelectronics; Monolithic integrated circuits; Optical materials; Photonics; Silicon;
Conference_Titel :
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN :
0-7803-9070-9
DOI :
10.1109/GROUP4.2005.1516389
