Title :
A novel floating gate engineering technique for improved data retention of flash memory devices
Author :
Pu, Jing ; Chan, Daniel S H ; Cho, Byung Jin
Author_Institution :
Dept. of ECE, Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
We propose one novel approach on engineering floating gate (FG) of Flash memory cell: carbon incorporation into polysilicon FG. This technique demonstrated improvement in retention and larger program/erase Vth window, especially for smaller capacitance coupling ratio cell which is important for future scaled Flash memory cells.
Keywords :
capacitance; carbon; elemental semiconductors; flash memories; silicon; Si:C; capacitance coupling ratio; data retention; flash memory devices; floating gate; program-erase characteristic; Annealing; Conductivity; Data engineering; Electronic mail; Electrons; Flash memory; Flash memory cells; Nonvolatile memory; Silicon carbide; Tunneling;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4734673