Title :
Fabrication of silicon-on-glass waveguides
Author :
Yang, Jianyi ; Li, Guangbo ; Xiao, Simiao ; Wang, Fan ; Li, Yubo ; Jiang, Xiaoqing ; Wang, Minghua ; Wang, Yuelin
Author_Institution :
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
Abstract :
The method to fabricate silicon-on-glass materials for the applications of integrated optics and photonics is proposed. Anodic boning and selective etching are employed. SOG-based rib waveguides and nano-films are then studied.
Keywords :
etching; integrated optics; nanostructured materials; optical fabrication; optical films; optical waveguides; rib waveguides; silicon-on-insulator; thin films; SOG; Si-SiO2; anodic boning; integrated optics; integrated photonics; nanofilms; rib waveguides; selective etching; silicon-on-glass materials; silicon-on-glass waveguides; waveguide fabrication; Etching; Glass; Integrated optics; Optical device fabrication; Optical materials; Optical waveguide theory; Optical waveguides; Photonics; Silicon; Wafer bonding;
Conference_Titel :
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN :
0-7803-9070-9
DOI :
10.1109/GROUP4.2005.1516405
