Title :
Inductive RF-discharge of low pressure in a magnetic field
Author :
Bystrov, A.M. ; Guschin, M.E. ; Kostrov, A.V. ; Strikovsky, A.V. ; Smirnov, A.I. ; Krafft, K.
Author_Institution :
Inst. of Appl. Phys., Acad. of Sci., Nizhny Novgorod, Russia
Abstract :
This paper studies the low-pressure inductive RF discharge used to create plasma in a large vacuum chamber with the trap configuration of the magnetic field. The focus task of the paper is to determine the regions of efficient ionization and energy exchange between the RF field and the plasma.
Keywords :
discharges (electric); magnetic fields; plasma density; plasma production; pressure; efficient ionization regions; energy exchange; large vacuum chamber; low-pressure inductive RF discharge; magnetic field trap configuration; plasma production; Density measurement; Electrons; Inductors; Magnetic field measurement; Magnetic fields; Magnetic shielding; Plasma density; Plasma measurements; Plasma temperature; Probes;
Conference_Titel :
Discharges and Electrical Insulation in Vacuum, 2002. 20th International Symposium on
Print_ISBN :
0-7803-7394-4
DOI :
10.1109/ISDEIV.2002.1027436
