DocumentCode
2146845
Title
Inductive RF-discharge of low pressure in a magnetic field
Author
Bystrov, A.M. ; Guschin, M.E. ; Kostrov, A.V. ; Strikovsky, A.V. ; Smirnov, A.I. ; Krafft, K.
Author_Institution
Inst. of Appl. Phys., Acad. of Sci., Nizhny Novgorod, Russia
fYear
2002
fDate
2002
Firstpage
572
Lastpage
575
Abstract
This paper studies the low-pressure inductive RF discharge used to create plasma in a large vacuum chamber with the trap configuration of the magnetic field. The focus task of the paper is to determine the regions of efficient ionization and energy exchange between the RF field and the plasma.
Keywords
discharges (electric); magnetic fields; plasma density; plasma production; pressure; efficient ionization regions; energy exchange; large vacuum chamber; low-pressure inductive RF discharge; magnetic field trap configuration; plasma production; Density measurement; Electrons; Inductors; Magnetic field measurement; Magnetic fields; Magnetic shielding; Plasma density; Plasma measurements; Plasma temperature; Probes;
fLanguage
English
Publisher
ieee
Conference_Titel
Discharges and Electrical Insulation in Vacuum, 2002. 20th International Symposium on
Print_ISBN
0-7803-7394-4
Type
conf
DOI
10.1109/ISDEIV.2002.1027436
Filename
1027436
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