Title :
Design of Micromachined RF Switch
Author :
Chen, Shuguang ; Suzuki, Kenichiro ; Marumoto, Tsunehisa ; Ara, Youichi ; Iwata, Ryuichi
Author_Institution :
Microwave and Satellite Communications Division, NEC Corporation, 4035, Ikebe-Cho, Tsuzuki-ku, Yokohama 224-8555, Japan
Abstract :
The switch contact design of mechanical micromachined switches on the standpoint of the tradeoff between the return loss in the "On" state and the isolation in the "Off" state is discussed. The electrical characteristics of the switch fabricated on a glass substrate were measured from 1GHz to 30GHz. Insertion loss less than 0.3dB and return loss less than ¿15dB at 30GHz were obtained.
Keywords :
Communication switching; Contacts; Electrodes; Glass; Insertion loss; Insulation; Microstrip; Radio frequency; Substrates; Switches;
Conference_Titel :
Microwave Conference, 1999. 29th European
Conference_Location :
Munich, Germany
DOI :
10.1109/EUMA.1999.338406
