Title :
Optical characterization of silicon nitride low-loss waveguides in the near infrared range
Author :
Melchiorri, M. ; Daldosso, N. ; Pavesi, Lorenzo ; Pucker, Georg ; Kompocholis, C.
Author_Institution :
Dept. of Phys., Trento Univ., Italy
Abstract :
This paper reports on Si3N4/SiO2 multilayer waveguides to increase the optical confinement factor and, as consequence, to reduce optical losses.
Keywords :
optical losses; optical multilayers; optical waveguides; silicon compounds; Si3N4-SiO2; Si3N4/SiO2 multilayer waveguides; near infrared range; optical confinement factor; optical loss reduction; Etching; Nonhomogeneous media; Optical films; Optical losses; Optical refraction; Optical scattering; Optical variables control; Optical waveguides; Propagation losses; Silicon;
Conference_Titel :
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN :
0-7803-9070-9
DOI :
10.1109/GROUP4.2005.1516425