Title :
Thermo-electro-optical analysis of modulator embedded in all-silicon structure
Author :
Zaccuri, Rocco Cristian ; Coppola, Giuseppe ; Iodice, Mario
Author_Institution :
Consiglio Nazionale delle Ricerche Sezione, Istituto per la Microelettronica e Microsistemi, Napoli, Italy
Abstract :
Silicon is the most diffused material for microelectronic industry. We propose a thermo-electrical simulation of an integrated optical modulator realized by ion implantation in SOI wafer. This structure allows to obtain an easier integration with electronic devices.
Keywords :
electro-optical modulation; elemental semiconductors; integrated optics; ion implantation; optical materials; silicon; silicon-on-insulator; thermo-optical devices; SOI wafer; Si; diffused material; integrated optical modulator; ion implantation; microelectronics; silicon; thermo-electro-optical analysis; Analytical models; Optical attenuators; Optical devices; Optical filters; Optical modulation; Optical refraction; Optical scattering; Optical variables control; Optical waveguides; Plasma waves;
Conference_Titel :
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN :
0-7803-9070-9
DOI :
10.1109/GROUP4.2005.1516430
