Design and fabrication of Bragg reflectors based on SU-8

Author

Shu, Zhen ; Wan, Jing ; Xie, Shen-Qi ; Lu, Bing-Rui ; Chen, Yifang ; Qu, Xin-Ping ; Liu, Ran

Author_Institution

Dept. of Microelectron., Fudan Univ., Shanghai, China

fYear

2008

fDate

20-23 Oct. 2008

Firstpage

988

Lastpage

991

Abstract

We report the design and fabrication of two kinds of distributed Bragg reflectors (DBRs). One is a Bragg filter which introduces a periodic height modulation in part of a waveguide, and the other is a horizontal DBR with a deeply patterned grating structure in a waveguide at a freespace wavelength of 1.55 um (the propagation loss of quartz fiber used in optical communication is lowest around 1.55 um wavelength) based on a Si/SiO2/SU8/air structure. The transfer matrix theory was used to calculate the spectral response of the Bragg filter and its dependence on the height modulation and the grating length. In addition, a multilayer film reflection theory was applied to simulate reflection spectrum of the DBR and estimate the least number of pairs of DBR mirrors needed for almost 100% (Â¿ 99.6%) reflection. Based on the simulation results, we designed and successfully fabricated these two types of DBRs with Si/SiO2/SU8/air structures.

Keywords

Bragg gratings; air; distributed Bragg reflectors; optical fibre filters; optical fibre losses; optical multilayers; polymer films; quartz; reflectivity; silicon; Bragg filter; DBR mirrors; deeply patterned grating structure; distributed Bragg reflectors; freespace wavelength; multilayer film; optical communication; periodic height modulation; propagation loss; quartz fiber; reflection theory; spectral response; transfer matrix theory; waveguide; wavelength 1.55 mum; Bragg gratings; Distributed Bragg reflectors; Fabrication; Fiber gratings; Optical fiber communication; Optical fiber filters; Optical reflection; Optical waveguide components; Optical waveguides; Periodic structures;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-2185-5

Electronic_ISBN

978-1-4244-2186-2

Type

conf

DOI

10.1109/ICSICT.2008.4734710

Filename

4734710