Title :
Basic photonic wire components in silicon-on-insulator
Author :
Dumon, Pieter ; Roelkens, Gunther ; Bogaerts, Wim ; Van Thourhout, Dries ; Wouters, Johan ; Beckx, Stephan ; Jaenen, Patrick ; Baets, Roel
Author_Institution :
Dept. of Information Technol., Ghent Univ., Belgium
Abstract :
We fabricated basic structures for photonic integrated circuits in silicon-on-insulator photonic wires using CMOS technology. We show low-loss bends and waveguide intersections, power splitters, MMI´s and Mach-Zehnder interferometers.
Keywords :
CMOS integrated circuits; Mach-Zehnder interferometers; integrated optics; optical beam splitters; optical fabrication; optical waveguides; silicon-on-insulator; waveguide discontinuities; CMOS; MMI; Mach-Zehnder interferometers; optical fabrication; photonic integrated circuits; photonic wire components; power splitters; silicon-on-insulator; waveguide intersections; CMOS process; CMOS technology; Crosstalk; Integrated circuit technology; Loss measurement; Optical fiber couplers; Photonic integrated circuits; Propagation losses; Silicon on insulator technology; Wire;
Conference_Titel :
Group IV Photonics, 2005. 2nd IEEE International Conference on
Print_ISBN :
0-7803-9070-9
DOI :
10.1109/GROUP4.2005.1516448
