• DocumentCode
    2147932
  • Title

    Investigations on In0.2Ga0.8AsSb/GaAs high electron mobility transistors with gate passivations

  • Author

    Lee, Ching-Sung ; He, Ciou-Sheng ; Hsu, Wei-Chou ; Su, Ke-Hua ; Yang, Ping-Chang ; Chou, Bo-I ; Kao, An-Yung

  • Author_Institution
    Dept. of Electron. Eng., Feng Chia Univ., Taichung, Taiwan
  • fYear
    2008
  • fDate
    20-23 Oct. 2008
  • Firstpage
    1106
  • Lastpage
    1109
  • Abstract
    This work reports, high electron mobility transistors (HEMTs) using a dilute antimony In0.2Ga0.8AsSb channel, grown by molecular beam epitaxy (MBE) system. Introducing the surfactant-like Sb atoms during growth of the InGaAs/GaAs quantum well (QW) was devised to effectively improve the channel confinement capability and the interfacial quality within the InGaAsSb/GaAs QW heterostructure, resulting in enhanced carrier transport property and superior device performances. In comparison, the proposed devices with employing sulfur (NH4)2Sx passivation (sample A), silicon nitride (SiNx) surface passivation (sample B), or without passivation (sample C) have been investigated. Sample A (B/C) has demonstrated superiorly the maximum extrinsic trans-conductance (gm, max) of 221 (205/183) mS/mm, the drain saturation current density (IDSS) of 205 (190/174) mA/mm, the gate-voltage swing (GVS) of 1.105 (1.28/1.482) V, and the P.A.E. characteristic 30.4 (21.4/13) % at 300 K, with the gate dimensions of 1 × 200 ¿m2.
  • Keywords
    gallium arsenide; gallium compounds; high electron mobility transistors; indium compounds; molecular beam epitaxial growth; passivation; quantum well devices; semiconductor device measurement; semiconductor growth; semiconductor heterojunctions; semiconductor quantum wells; silicon compounds; wide band gap semiconductors; HEMT; In0.2Ga0.8AsSb-GaAs; MBE growth; QW heterostructure; SiNx; carrier transport; channel confinement capability; drain saturation current density; extrinsic transconductance; gate passivations; gate-voltage swing; high-electron mobility transistors; interfacial quality; molecular beam epitaxy; quantum well; silicon nitride surface passivation; sulfur passivation; temperature 300 K; Atomic layer deposition; Carrier confinement; Current density; Gallium arsenide; HEMTs; Indium gallium arsenide; MODFETs; Molecular beam epitaxial growth; Passivation; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4244-2185-5
  • Electronic_ISBN
    978-1-4244-2186-2
  • Type

    conf

  • DOI
    10.1109/ICSICT.2008.4734730
  • Filename
    4734730