DocumentCode :
2147932
Title :
Investigations on In0.2Ga0.8AsSb/GaAs high electron mobility transistors with gate passivations
Author :
Lee, Ching-Sung ; He, Ciou-Sheng ; Hsu, Wei-Chou ; Su, Ke-Hua ; Yang, Ping-Chang ; Chou, Bo-I ; Kao, An-Yung
Author_Institution :
Dept. of Electron. Eng., Feng Chia Univ., Taichung, Taiwan
fYear :
2008
fDate :
20-23 Oct. 2008
Firstpage :
1106
Lastpage :
1109
Abstract :
This work reports, high electron mobility transistors (HEMTs) using a dilute antimony In0.2Ga0.8AsSb channel, grown by molecular beam epitaxy (MBE) system. Introducing the surfactant-like Sb atoms during growth of the InGaAs/GaAs quantum well (QW) was devised to effectively improve the channel confinement capability and the interfacial quality within the InGaAsSb/GaAs QW heterostructure, resulting in enhanced carrier transport property and superior device performances. In comparison, the proposed devices with employing sulfur (NH4)2Sx passivation (sample A), silicon nitride (SiNx) surface passivation (sample B), or without passivation (sample C) have been investigated. Sample A (B/C) has demonstrated superiorly the maximum extrinsic trans-conductance (gm, max) of 221 (205/183) mS/mm, the drain saturation current density (IDSS) of 205 (190/174) mA/mm, the gate-voltage swing (GVS) of 1.105 (1.28/1.482) V, and the P.A.E. characteristic 30.4 (21.4/13) % at 300 K, with the gate dimensions of 1 × 200 ¿m2.
Keywords :
gallium arsenide; gallium compounds; high electron mobility transistors; indium compounds; molecular beam epitaxial growth; passivation; quantum well devices; semiconductor device measurement; semiconductor growth; semiconductor heterojunctions; semiconductor quantum wells; silicon compounds; wide band gap semiconductors; HEMT; In0.2Ga0.8AsSb-GaAs; MBE growth; QW heterostructure; SiNx; carrier transport; channel confinement capability; drain saturation current density; extrinsic transconductance; gate passivations; gate-voltage swing; high-electron mobility transistors; interfacial quality; molecular beam epitaxy; quantum well; silicon nitride surface passivation; sulfur passivation; temperature 300 K; Atomic layer deposition; Carrier confinement; Current density; Gallium arsenide; HEMTs; Indium gallium arsenide; MODFETs; Molecular beam epitaxial growth; Passivation; Silicon compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
Type :
conf
DOI :
10.1109/ICSICT.2008.4734730
Filename :
4734730
Link To Document :
بازگشت