DocumentCode
2147995
Title
Impact of process variability on a frequency-addressed NEMS array sensor used for gravimetric detection
Author
Martin, Olivier ; Colinet, E. ; Sage, E. ; Dupre, C. ; Villard, Patrick ; Hentz, S. ; Duraffourg, L. ; Ernst, Thomas
Author_Institution
CEA-Leti, Grenoble, France
fYear
2013
fDate
16-20 Sept. 2013
Firstpage
65
Lastpage
68
Abstract
Based on experimental results and a dedicated model, the impact of various technological parameters on the performance of a frequency addressed NEMS arrays sensor is investigated for mass sensing application. It is shown that the number of NEMS resonators that can be addressed in parallel is limited by critical dimensions fluctuations, the quality factor of the NEMS and their resonance frequencies.
Keywords
Q-factor; gravimeters; mass measurement; micromechanical resonators; nanoelectromechanical devices; sensor arrays; NEMS resonators; critical dimensions fluctuations; frequency-addressed NEMS array sensor; gravimetric detection; mass sensing application; process variability; quality factor; resonance frequency; technological parameters; Arrays; Dispersion; Fabrication; Frequency measurement; Nanoelectromechanical systems; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference (ESSDERC), 2013 Proceedings of the European
Conference_Location
Bucharest
Type
conf
DOI
10.1109/ESSDERC.2013.6818820
Filename
6818820
Link To Document