Title :
New Techniques for On-Wafer Calibration Over Temperature
Author :
Pattison, L. ; Buchanan, N. ; Linton, D.
Author_Institution :
The Department of Electrical and Electronic Engineering, The Queen´´s University of Belfast, Ashby Building, Stranmillis Road, Belfast, BT9 5AH, N. Ireland, Tel: +44 +(0)1232 274089, Fax +44 +(0)1232 667023, e-mail: lyndon.pattison@ee.qub.ac.uk
Abstract :
A more convenient approach for on-wafer calibration over temperature is presented. A comparison of the new technique with the existing TRL technique is reported. This new technique is utilized to characterize a set of 150 ¿m GSG probes to 50 GHz over temperature. V-band probes operating from 50 to 75 GHz have also been characterized. Software has been developed that permits the user to calculate the error coefficients at any temperature, whilst only having to perform the calibration at room temperature.
Keywords :
Calibration; Frequency measurement; Length measurement; Measurement standards; Microwave measurements; Probes; Q measurement; Temperature control; Temperature dependence; Temperature measurement;
Conference_Titel :
Microwave Conference, 1999. 29th European
Conference_Location :
Munich, Germany
DOI :
10.1109/EUMA.1999.338454
