The Coupled Atom Transistor: A first realization with shallow donors implanted in a FDSOI silicon nanowire

Following the recent development of Single Atom Transistors [1,2], we realized the first Coupled Atom Transistor in a small silicon nanowire MOSFET. Three independent gates control two donors connected in series between the source and the drain in a small volume of silicon. The devices, either implanted with Phosphorus (10²⁴m^-3) or Arsenic atoms, are fabricated with SOI technology on 200 and 300 mm wafers [3]. We observe resonant transport through two donors in series, and spectroscopy of a single donor state can be performed. We further demonstrate charge pumping and coherent electron exchange between the two donors involving Landau-Zener transitions.