• DocumentCode
    2148743
  • Title

    Weibull analysis of the kinetics of resistive switches based on tantalum oxide thin films

  • Author

    Nishi, Yoshio ; Schmelzer, Sebastian ; Bottger, Ulrich ; Waser, Rainer

  • Author_Institution
    Corp. R&D Center, Adv. LSI Technol. Lab., Toshiba Corp., Kawasaki, Japan
  • fYear
    2013
  • fDate
    16-20 Sept. 2013
  • Firstpage
    174
  • Lastpage
    177
  • Abstract
    We study the kinetics of bipolar resistive switches in tantalum oxide thin films having different thicknesses. The time to switch from the high resistance state to the low resistance state (SET) is measured repeatedly in a single cell of each sample and analyzed based on a Weibull distribution. In the thin film device the Weibull parameter fJ> 1 is observed in the short time region, followed by a distribution with ß <; 1 in the long time region. This indicates that a progressing phenomenon induces the SET action in the short time region, while it is saturated in the long time region, where the SET is triggered by a sporadic event. In the thick film sample a distribution with ß<; 1 is dominant almost in the whole time range. Further analysis revealed that the heat generated before the switch-on can be responsible for the SET in the fJ> 1 mode.
  • Keywords
    Weibull distribution; semiconductor switches; semiconductor thin films; tantalum compounds; Weibull analysis; Weibull distribution; bipolar resistive switches; tantalum oxide thin films; thin film device; Current measurement; Heating; Kinetic theory; Pulse measurements; Switches; Voltage measurement; Weibull distribution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference (ESSDERC), 2013 Proceedings of the European
  • Conference_Location
    Bucharest
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2013.6818847
  • Filename
    6818847