Title :
Simmwic Capacitive RF Switches
Author :
Strohm, K.M. ; Rheinfelder, C.N. ; Schurr, A. ; Luy, J.F.
Author_Institution :
DaimlerChrysler Research Center Ulm, Wilhelm-Runge-Str. 11, D-89081 Ulm, Germany. E-Mail: karl.strohm@daimlerchrysler.com
Abstract :
Capacitive RF metal membrane switches have been fabricated on pyrex and high-resistivity silicon wafer using CPW transmission lines and a modified air-bridge technology. Actuation voltage down to 25 V has been achieved. The switches exhibit low loss (<0.4 dB @ 35GHz) with good isolation (35 dB @ 35 GHz).
Keywords :
Biomembranes; Coplanar waveguides; Fabrication; Gold; Micromechanical devices; Power transmission lines; Radio frequency; Resists; Silicon; Switches;
Conference_Titel :
Microwave Conference, 1999. 29th European
Conference_Location :
Munich, Germany
DOI :
10.1109/EUMA.1999.338387
