A three-level wiring capacitance analysis for VLSIs using a three-dimensional simulator

A three-dimensional simulator has been developed for calculating the capacitance values for three-level interconnections. This simulator has been proved to be sufficiently effective and exact by comparisons between simulation results and actual measurement. In the case of three-level interconnections, compared with the single-level interconnection case, the cross-wiring capacitance values were larger and the adjacent wiring capacitance values were smaller. The necessity for a simulator which can handle more than four-level interconnections is discussed. Some scaling effects are also considered.<>