Flexible platinum nanoparticle strain sensors

Author

Skotadis, E. ; Mousadakos, D. ; Tanner, Jared ; Tsoukalas, D. ; Broutas, P.

Author_Institution

Dept. of Appl. Sci., Nat. Tech. Univ. of Athens, Athens, Greece

fYear

2013

fDate

16-20 Sept. 2013

Firstpage

354

Lastpage

357

Abstract

Using a modified magnetron sputtering technique, platinum nanoparticles having a mean diameter of 4-6 nm have been deposited on flexible polyimide substrates. The polyimide substrates have been previously patterned with gold interdigitated electrodes having an inter-finger distance of 10 μm using conventional photo lithography and the e-gun evaporation of gold. By controlling the nanoparticle deposition time, platinum nanoparticle sensors of varying sensitivity can be produced. As a result a flexible cost effective alternative to silicon strain sensors is hereby presented.

Keywords

electrodes; evaporation; nanoparticles; nanosensors; photolithography; platinum; polymers; sputter deposition; strain sensors; Pt; distance 10 mum; e-gun evaporation; flexible platinum nanoparticle strain sensors; flexible polyimide substrate; gold interdigitated electrode; interfinger distance; modified magnetron sputtering technique; nanoparticle deposition time; photo lithography; size 4 nm to 6 nm; Nanoparticles; Polyimides; Sensors; Strain; Substrates; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference (ESSDERC), 2013 Proceedings of the European

Conference_Location

Bucharest

Type

conf

DOI

10.1109/ESSDERC.2013.6818891

Filename

6818891