Title :
MEMS sensors for high voltage lines
Author :
Moagar-Poladian, Victor ; Moagar-Poladian, Gabriel
Author_Institution :
Nat. Inst. for R&D in Microtechnol., Bucharest, Romania
Abstract :
The paper presents the application for the first time, to our knowledge, of MEMS devices in the field of high power, high voltage lines. We show how these devices can be used for measuring instantaneous voltage value in real-life industrial conditions. The high voltage MEMS device allows a voltage measurement relative error less than 0,1 % in normal conditions while during a strong earthquake (0,28g soil acceleration - `g´ is the gravitational acceleration) it increases to 6 %. We present simulation results and the experimental realization of the optimized sensor model in polymer by using 3D Rapid Prototyping means.
Keywords :
acceleration; earthquakes; microsensors; optimisation; power semiconductor devices; voltage measurement; 3D rapid prototyping; MEMS devices; MEMS sensors; earthquake; gravitational acceleration; high power lines; high voltage lines; instantaneous voltage; optimized sensor model; soil acceleration; voltage measurement relative error; Acceleration; Micromechanical devices; Optical interferometry; Optical sensors; Temperature measurement; Voltage measurement;
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2013 Proceedings of the European
Conference_Location :
Bucharest
DOI :
10.1109/ESSDERC.2013.6818892
