• DocumentCode
    2150244
  • Title

    Open-loop-control of pore formation in semiconductor etching

  • Author

    Claussen, Jens Christian ; Carstensen, Jurgen ; Christophersen, M. ; Langa, Sergiu ; Foll, Helmut

  • Author_Institution
    Inst. fur Theor. Phys. & Astrophys., Kiel Univ., Germany
  • Volume
    3
  • fYear
    2003
  • fDate
    20-22 Aug. 2003
  • Firstpage
    895
  • Abstract
    Electrochemical etching of semiconductors gives rise to a wide variety of self-organized structures including fractal structures, regular and branching pores. The current-burst model and the aging concept are considered to describe the dynamical behavior governing the structure formation. Here the suppression of side-branching during pore growth is demonstrated by an open-loop-control method, resulting in pores with oscillating diameter.
  • Keywords
    anodisation; current fluctuations; dissolving; etching; fractals; passivation; porous semiconductors; aging concept; branching pores; current-burst model; dissolution; electrochemical etching; fractal structures; open-loop-control; oscillating diameter; pore formation; regular pores; self-organized structures; semiconductor etching; side-branching suppression; Doping; Etching; Gallium arsenide; Human computer interaction; Indium phosphide; Lighting; Plasma welding; Temperature control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physics and Control, 2003. Proceedings. 2003 International Conference
  • Print_ISBN
    0-7803-7939-X
  • Type

    conf

  • DOI
    10.1109/PHYCON.2003.1237020
  • Filename
    1237020