DocumentCode
2150594
Title
Control of the interface roughness in highly strained InxGa1-xAs/In0.52Al0.48As heterostructures
Author
Perez, M. A Garcia ; Benyattou, T. ; Tabata, A. ; Guillot, G. ; Gendry, M. ; Drouot, V. ; Hollinger, G.
Author_Institution
Lab. de Phys. de la Matiere, Inst. National des Sciences Appliquees (INSA), Lyon, France
fYear
1994
fDate
27-31 Mar 1994
Firstpage
571
Lastpage
574
Abstract
InGaAs/InAlAs heterostructures lattice mismatched to InP have emerged as an important system for microoptoelectronic applications, thanks to the large band gap of InAlAs and the high conduction band discontinuity at the interface. Moreover, a high carrier confinement and a small effective mass of the electrons in the InGaAs layer make this system very suitable for high speed devices. However, to achieve the theoretical performances of the devices, high quality layers and abrupt interfaces are required. The interface roughness can be very sensitive to the growth conditions. This is specially true for molecular beam epitaxy (MBE) growth of compressively strained In-rich InxGa 1-xAs layers. Such layers may develop some surface roughness followed by the appearance of three dimensional (3D) islands when the epilayer thickness and the strain increase. In this work we show that structural properties of quantum well interfaces can be characterized by photoluminescence (PL) spectroscopy, leading to important informations about the surface roughness and the growth mode
Keywords
III-V semiconductors; aluminium compounds; energy gap; gallium arsenide; indium compounds; integrated optoelectronics; luminescence of inorganic solids; molecular beam epitaxial growth; photoluminescence; semiconductor epitaxial layers; semiconductor growth; semiconductor quantum wells; surface topography; InGaAs-InAlAs; InGaAs/InAlAs heterostructures; band gap; carrier confinement; compressively strained layers; conduction band discontinuity; effective mass; epilayer thickness; growth mode; interface roughness; microoptoelectronic applications; molecular beam epitaxy; photoluminescence; quantum well interfaces; surface roughness; three dimensional islands; Carrier confinement; Indium compounds; Indium gallium arsenide; Indium phosphide; Lattices; Molecular beam epitaxial growth; Photonic band gap; Rough surfaces; Strain control; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Indium Phosphide and Related Materials, 1994. Conference Proceedings., Sixth International Conference on
Conference_Location
Santa Barbara, CA
Print_ISBN
0-7803-1476-X
Type
conf
DOI
10.1109/ICIPRM.1994.328296
Filename
328296
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