DocumentCode :
2150620
Title :
The effect of perimeter geometry on FBAR resonator electrical performance
Author :
Ruby, Rich ; Larson, Jeffrey ; Feng, C.
Author_Institution :
Agilent Technol. Inc., San Jose, CA, USA
fYear :
2005
fDate :
12-17 June 2005
Abstract :
We describe the first four Lamb-Rayleigh modes seen in an FBAR resonator. We also describe the effect of apodization (non parallel edges) have on the kx-ky space as compared to square resonators.
Keywords :
acoustic imaging; acoustic resonator filters; bulk acoustic wave devices; geometry; FBAR resonator; Lamb-Rayleigh modes; apodization effect; bulk acoustic wave devices; electrical performance; non parallel edges; perimeter geometry; square resonators; Acoustic waves; Film bulk acoustic resonators; Frequency; Geometry; Insertion loss; Microscopy; Resonance; Resonator filters; Space technology; Switches;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Symposium Digest, 2005 IEEE MTT-S International
ISSN :
01490-645X
Print_ISBN :
0-7803-8845-3
Type :
conf
DOI :
10.1109/MWSYM.2005.1516563
Filename :
1516563
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2150620
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