DocumentCode
2150729
Title
Comparison of mode-conversion, energy-trapping and lateral acoustic coupling in FBAR and SBAR
Author
Milsom, R.F. ; Vanhelmont, F. ; Jansman, A.B.M. ; Lobeek, J.-W.
Author_Institution
Philips Res. Labs., Redhill, UK
fYear
2005
fDate
12-17 June 2005
Abstract
2D mode-matching theory is used to explore differences between the two types of thin-film bulk-acoustic wave (BAW) resonator, based on membrane (FBAR) and Bragg reflector (SBAR). Issues of mode-conversion and energy-trapping are explored. Lateral acoustic coupling is addressed in the presentation. The most significant finding is that the SBAR reflector plays a significant part in the reduction of spurious responses close to the fundamental frequency of BAW resonators and filters.
Keywords
acoustic resonator filters; bulk acoustic wave devices; mode matching; thin film devices; 2D mode-matching theory; BAW filters; BAW resonator; Bragg reflector; FBAR; SBAR reflector; bulk acoustic wave devices; lateral acoustic coupling; thin-film bulk-acoustic wave resonator; Acoustic devices; Bulk acoustic wave devices; Electrodes; Film bulk acoustic resonators; Laboratories; Piezoelectric films; Radio frequency; Resonance; Resonator filters; Thin film devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2005 IEEE MTT-S International
ISSN
01490-645X
Print_ISBN
0-7803-8845-3
Type
conf
DOI
10.1109/MWSYM.2005.1516566
Filename
1516566
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