DocumentCode
2151634
Title
Ferromagnetic RF integrated inductor with closed magnetic circuit structure
Author
Yamaguchi, Masaki ; Seok Bae ; Ki Hyeon Kim ; Tan, Kokkiong ; Kusumi, T. ; Yamakawa, Kiyoshi
Author_Institution
Dept. of Electr. & Commun. Eng., Tohoku Univ., Japan
fYear
2005
fDate
12-17 June 2005
Abstract
Closed magnetic circuit type ferromagnetic RF integrated inductors have been fabricated based on MEMS-like micro fabrication techniques. The taper etching process greatly helped to endure sufficient magnetic flux flow at the edge of the top and bottom magnetic layers. Air cores and three different sandwich type ferromagnetic inductors are also microfabricated. Measured results exhibited the quality factor Q=12, being highest among the published data of ferromagnetic RF integrated inductor at 1 GHz.
Keywords
Q-factor; etching; ferromagnetic materials; magnetic circuits; magnetic flux; thin film inductors; 1 GHz; MEMS; RF integrated inductor; air cores; closed magnetic circuit structure; ferromagnetic inductor; magnetic flux flow; magnetic layers; micro fabrication techniques; quality factor; taper etching process; Coils; Electromagnetic fields; Leg; Magnetic circuits; Magnetic films; Magnetic flux; Q factor; Radio frequency; Spirals; Thin film inductors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2005 IEEE MTT-S International
ISSN
01490-645X
Print_ISBN
0-7803-8845-3
Type
conf
DOI
10.1109/MWSYM.2005.1516599
Filename
1516599
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