Title :
A ±15V interface IC for capacitive accelerometer
Author :
Huang, Wengang ; He, Zhengrong ; Liu, Luncai ; Zhong, Yingjun ; Li, Kaicheng ; Wu, Wei
Author_Institution :
Nat. Labs. of Analog IC, Chongqing, China
Abstract :
In this study, an interface IC for capacitive accelerometer sensor was designed, was processed in 6 um standard bipolar process, and the IC operates in the supply voltage ranges ±6 V-±18 V. The IC consists of an active square wave generator, a symmetrical voltage reference, a low-capacitance high-impedance voltage buffer, demodulation block, pre-amplifier, self-testing module, etc. It can form a complete self-testable one-dimensional accelerometer together with a MEMS differential capacitive acceleration sensor, without any other active devices. At a supply voltage of ±15 V, the tested results are as follows. The scale factor is 60 mV/g, low-frequency noise is 26 mgrms, 30-min zero drift is 54 mg, zero temperature drift in the range -40°C to 60°C is -13 mg/°C, response frequency reaches 2 kHz, and total power consumption is 48 mW only.
Keywords :
accelerometers; capacitive sensors; microsensors; square-wave generators; MEMS differential capacitive acceleration sensor; active square wave generator; capacitive accelerometer sensor; demodulation block; interface IC; low-capacitance high-impedance voltage buffer; self-testable one-dimensional accelerometer; symmetrical voltage reference; Acceleration; Accelerometers; Bipolar integrated circuits; Built-in self-test; Capacitive sensors; Demodulation; Micromechanical devices; Process design; Testing; Voltage;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4734895