Microtechnologies for the monolithic fabrication of mm and submm non linear devices

We report on the recent development in microtechnology aimed at monolithically fabricating non linear devices at millimetre and submillimetre wavelengths. This approach will be illustrated with the fabrication of planar integrated Heterostructure Barrier Varactors and Schottky mixers for a use at 250 GHz and 500 GHz respectively. Also, epitaxial lift-off, followed by a transfer onto a host quartz substrate demonstrated here should permit us to further integrate the devices with the filtering and matching circuits in a monolithic fashion.