A Hybrid Micromachined High -Q Cavity Resonator at 5.8 GHz

A novel hybrid micromachined resonator with high quality factor and small size at 5.8GHz is presented. The design of the resonator is based on a micromachined cavity filled with a high dielectric constant material. Energy is coupled into the cavity from input and output microstrip lines via slots. It is shown experimentally that the limiting factor in achieving a higher Q with the given dielectric materials is the dielectric loss. This resonator provides a low cost, minimum size and compact solution for the fabrication of planar, narrow-band filters and diplexers in modern wireless communication systems.