Title :
Characterization of thin film BST tunable capacitors using a simple two port measurement technique
Author :
Zhu, Xinen ; Chen, Ding-Yuan ; Jin, Zhang ; Phillips, Jamie D. ; Mortazawi, Amir
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
A simple two-port measurement technique was developed based on equivalent lumped element circuit model of capacitor using thin film barium strontium titanate (BST) material. This technique allows one to determine the loss contribution due to dielectric BST and conductor separately. The loss tangent of BST obtained is about 0.012 up to 10 GHz for a 0.24 pF capacitor. 2.4:1 tunability was achieved at the bias voltage of 15 V.
Keywords :
S-parameters; barium compounds; coplanar waveguides; equivalent circuits; loss measurement; strontium compounds; thin film capacitors; 0.012 to 10 GHz; 0.24 pF; 15 V; ABCD-parameter; CPW; bias voltage; dielectric BST; equivalent lumped element circuit model; loss contribution; port measurement technique; thin film BST; thin film barium strontium titanate material; tunable capacitors; Barium; Binary search trees; Capacitors; Conducting materials; Dielectric losses; Dielectric thin films; Measurement techniques; Thin film circuits; Transistors; Tunable circuits and devices;
Conference_Titel :
Microwave Symposium Digest, 2005 IEEE MTT-S International
Print_ISBN :
0-7803-8845-3
DOI :
10.1109/MWSYM.2005.1516674
